XYZ stages and multi-axis precision motion systems

Precision Multi-Axis Motion

XYZ Stages, 3-Axis Stages, XYZ Gantries and Precision Multi-Axis Motion Systems

XYZ stages provide automated precision linear motion in X, Y and Z. They are used in industrial automation, optics, photonics, microscopy, semiconductor inspection, laser processing, metrology, and micro-assembly.

Positioning Stages and Multi-Axis Engineered Motion Systems

XYZ stages are a special form of 3-axis linear stage. They provide precision linear motion in three degrees of freedom and can be combined with rotary stages, piezo scanners, hexapods, direct-drive gantries, air-bearing platforms, and advanced motion controllers for complete multi-axis automation systems.

PI provides a large variety of linear motion stages, from single-axis stepper motor stages and XY linear servo stages to complex 6-axis hexapod parallel-kinematic motion systems. In addition to conventional motorized stages, PI specializes in piezo-driven systems for ultra-high precision applications.

XYZ motion for automated positioning

Linear, rotary, piezo, and hexapod combinations

Direct-drive and air-bearing options

Nanometer-class encoder feedback

Industrial automation and metrology

Photonics, microscopy, and semiconductor use

Where Motorized High-Precision XYZ Stages Are Used

XYZ motorized stages are used wherever precise, automated positioning is required in three linear axes. Common applications include microscopy, semiconductor inspection, photonics alignment, laser processing, optical metrology, micro-assembly, and life-science instrumentation. They position samples, sensors, optics, probes, or tools with high accuracy and repeatability.

In microscopy, they enable automated scanning and focus control. In photonics, they align fibers, lenses, and photonic chips. In manufacturing, they support inspection, dispensing, machining, and assembly tasks. By combining precise motion in X, Y, and Z, motorized stages improve throughput, reduce manual adjustment, and enable repeatable automated processes.

XY, XYZ Stages and 3-Axis Stage Catalog

Download the catalog for more information on precision XY stages, XYZ stages, gantries, and multi-axis positioning systems.

Download PDF Catalog

XYZ Stage and Multi-Axis Motion Videos

Miniature XYZ Linear Air-Bearing Stage for Scanning, Alignment, and Precision Positioning

5-Axis Stage: Z, Theta-XY + XY Planar Stage for Semiconductor and Laser Processing

Precision Motorized 3-Axis Direct-Drive XYZ Gantry Stage for 3D Printing

Motorized XYZ Stages and Gantry Systems

Precision motorized XYZ gantry stage and multi-axis automation system.

Precision Motorized 3-Axis Linear Stage / Direct-Drive XYZ Gantry Stage

Direct-drive linear motors for high velocity and precision
Maximum velocity greater than 1 m/sec
Closed-loop feedback with nanometer-class resolution
High load capacity
Air-bearing or mechanical-bearing configurations

PI provides custom engineered precision motion and automation systems, from simple 3-axis motorized linear stage setups to complex XYZ gantry stages and nanopositioning systems with many coordinated axes.

Flexible 2-Axis and 3-Axis Motorized Stage Concept for Automation Projects

Preconfigured, tested, and tuned 2-axis / 3-axis translation stages
Synchronization of laser and motion control
XY and XYZ stage variations
Up to 400 mm XY travel and up to 100 mm Z travel
EtherCAT-based high-performance motion controller

Why custom tuned 3-axis stages are better

Watch video: X-417 automation XYZ motorized translation stage with EtherCAT controller for laser applications.

L-412 and V-731 XYZ Linear Stage Combination

Integrated linear motor driven XY translation stage
Ball-screw driven vertical linear stage
Nanometer resolution
High load capacity
Designed for industrial automation

L-412 linear translation stages are designed for industrial automation tasks and can be assembled into 3-axis XYZ systems or combined with V-731 high-speed XY linear motor stages.

V-551 Linear Motor 3-Axis Positioning Stage Combination

Linear motor driven stage
Nanometer resolution
High speed
Magnetic gravity force compensation for the Z axis

V-551 series linear motor translation stages are available with absolute and incremental encoders, making them suitable for demanding industrial automation and precision positioning tasks.

Multi-Axis Automation Test System Based on 3-Axis Linear Stage, Hexapod, and Voice-Coil Actuator

10-axis motorized stage for electronics and semiconductor test applications
Hexapod 6-axis stage with programmable pivot point
Voice-coil actuator with force and position control
XY linear motor stage and precision high-load vertical Z stage

Watch video: Automated multi-axis precision motion system for touch-panel testing.

Compact and Miniature XYZ Stage Combinations

Micro XYZ 3-Axis Linear Stage with Inertia Motor

Ultra-compact design
Resolution from microns down to nanometers
3-axis piezo stage and XY configurations
Travel ranges up to 32 mm
Self-clamping stick-slip motor with no holding current
UHV and non-magnetic options

Stick-slip miniature piezo linear motors are useful for precision motion applications where available space is limited.

Stick-slip miniature multi-axis precision positioning system.

M-122 miniature motorized XYZ linear stage

Miniature Servo Motorized XYZ Linear Stage Combination

Compact design with folded drive train
Linear encoder for high precision
Piezo add-on for high-speed scanning and alignment
Ball screw for low friction, high speed, and long lifetime

M-122 precision miniature linear translation stages can be combined into XY and XYZ assemblies for multi-axis precision positioning and alignment tasks.